Semiconductors & Chipmaking · Recorded milestone
EUV lithography
Recorded year2019
ASML's extreme-ultraviolet scanners print chip features with 13.5 nm light in volume production.
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- Electron microscopeRecorded · 1931requires
- Stored-program computerRecorded · 1948requires
- Integrated circuitRecorded · 1958requires
- MOSFETRecorded · 1959requires
- LaserRecorded · 1960enables
- MicroprocessorRecorded · 1971requires
- Wafer stepperRecorded · 1978enables
Led to
- AI chip export controlsRecorded · 2022enables
- Gate-all-around transistorsRecorded · 2022enables
- AI supercomputer campusesRecorded · 2024requires
- Backside power deliveryRecorded · 2026enables
- High-NA EUV chips on saleForecast · ~2027enables
- Expert-level general AIForecast · ~2028requires
- MetalensesForecast · ~2028enables
- Free-electron-laser EUV lightForecast · ~2035enables
- Zettascale supercomputersForecast · ~2035requires
- Superintelligence at homeForecast · ~2040requires
Sources & evidence
Dataset updated 2026-10-18. This individual record has not been separately re-reviewed.