Semiconductors & Chipmaking · Projected milestone

High-NA EUV chips on sale

Estimated year~2027

90% by 2028 · including earlier years

The year is an editorial timing estimate. The percentage applies to occurrence by the stated deadline. These estimates are not calibrated odds.

The first chips patterned with high-numerical-aperture EUV scanners reach shipping products.

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What the forecast means

Milestone stage: deployment

demonstrated

High-NA production patterning, already reported in HVM; shipment is separate.

Completion criteria: A manufacturer identifies the shipped product/process and High-NA-patterned layer, with customer delivery or a credible technical teardown/production confirmation. A scanner installation, wafer demo or HVM announcement alone does not qualify.

This page describes a forecast, rather than an achieved result. Read the methodology and assumptions.

Built on

EUV lithographyRecorded · 2019enables

Led to

Free-electron-laser EUV lightForecast · ~2035enables
Beyond-EUV lithographyForecast · ~2045enables

Sources & evidence

Intel Q2 2026 results, SEC Form 8-K attachment 2026-07-23
Intel reports high-volume manufacturing of a subset of Core Ultra Series 3 Panther Lake using ASML EXE High-NA EUV. Manufacturing is not itself proof that the relevant retail products have shipped.

Record reviewed 2026-10-18